1 : ventilated enclosure, an enclosed or partially enclosed space not designed for human occupancy, having a ventilation system that is capable of capturing and directing 100% of the released toxic gas into a discharge system. 2 : nonroutine access enclosure, an enclosure that is not routinely opened more than once a week for operational or maintenance purposes. 3 : access enclosure, an enclosure that meets the preceding criteria when it is closed but that also provides adequate face velocity to control exposure when the door/access panel is opened for maintenance or process adjustment. 4 : vacuum pump enclosure, an enclosure around a vacuum pump or other process that has no high pressure component or systems, resulting in a lower control velocity requirement. Heat exhaust requirements can generally provide the necessary control. [SEMI S2-93]
Search the Dictionary for More Terms