1 n : a unique, finite course of events defined by purpose or effect and achieved under given conditions. [SEMATECH] 2 v : to perform operations on data in process. [SEMATECH] 3 adj : fabrication equipment, inspection equipment, and cassette stage equipment used in semiconductor manufacturing. [SEMI E23-91] 4 n : a major group of sequential operations in the manufacture of an integrated circuit. Examples are E-beam lithography, thermal deposition, and reactive ion etch. [SEMATECH]
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