the total time (other than nonscheduled time) during which equipment is not operated, although it is in a condition to perform its intended function, and the chemicals and facilities are available. [SEMI E10-92] Also see standby state.
the total time (other than nonscheduled time) during which equipment is not operated, although it is in a condition to perform its intended function, and the chemicals and facilities are available. [SEMI E10-92] Also see standby state.