1 : in gas distribution systems, the quantity of test gas at 21.1 degrees C (70 degrees F) and 101.3 kPa (1 atm) flowing through a leak when the partial pressure of test gas on the high pressure side is 101.3 kPa, and the pressure on the low pressure side is below 2 Pa (2 S 10-4 torr). [SEMATECH] 2 : in mass flow controllers, the quantity of helium at 25 degrees C and 101.3 kPa (760 torr) flowing through a leak when the high pressure side is at 101.32 kPa and the low pressure side is below 100 Pa (approximately 1 torr). [SEMI E16-90]
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