1 : in quartz and high-temperature wafer carriers, either wall of a wafer carrier that is perpendicular to the wafer plane. [SEMI E2-93] 2 : in wafer transport equipment, the vertical planes not penetrated by any portion of the equipment. if a service connection such as a drain or an exhaust is brought out through a side, the boundary is defined by the nonservice portions of the equipment. [Adapted from SEMI E8-92]
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