a self-aligned silicide; a silicon or polysilicon reaction with a metal to form a new compound self-aligned to the desired device component structure, such as the gate, source, and drain regions. [SEMATECH]
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a self-aligned silicide; a silicon or polysilicon reaction with a metal to form a new compound self-aligned to the desired device component structure, such as the gate, source, and drain regions. [SEMATECH]