any of the six gases, all noble, comprising the extreme right-hand group of the Periodic Table; namely helium, neon, argon, krypton, xenon, and radon. [SEMI C3-94]
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any of the six gases, all noble, comprising the extreme right-hand group of the Periodic Table; namely helium, neon, argon, krypton, xenon, and radon. [SEMI C3-94]