abbreviation for peroxydisulfuric acid.
peroxydisulfuric acid (PDSA): a chemical used with sulfuric acid to clean wafers. When the two chemicals are combined, they become an aggressive cleaning solution referred to as "piranha." PDSA is classified as an ultrapure oxidant. NOTE-Other oxidants used instead of PDSA to create a piranha solution are hydrogen peroxide and ozone. [SEMATECH]
