1 : a silicon carbide structure on a diffusion furnace that supports a sled. [SEMATECH] 2 : in cluster tools, a blade transport module end effector designed to support the wafer. [SEMI E22-91]
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1 : a silicon carbide structure on a diffusion furnace that supports a sled. [SEMATECH] 2 : in cluster tools, a blade transport module end effector designed to support the wafer. [SEMI E22-91]