1 : a program unit that is discrete and identifiable with respect to compiling, combining with other units, and loading. For example, the unit may be the input to, or output from, an assembler, compiler, linkage editor, or executive routine. [SEMATECH] 2 : a logically separable part of a program. [SEMATECH] 3 : in modular equipment, an independently operable unit that is part of a tool or system. [SEMI E21-94] 4 : in the calibration of mass flow devices, the number of moles per unit of time flowing in a closed channel. [SEMI E29-93]
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