the lightest known gas; hydrogen vapors are highly flammable, colorless, odorless, tasteless, and nontoxic. Hydrogen is used as a means of providing a reducing atmosphere, as a carrier gas for epitaxial processes, and as a reagent to produce high-purity water. It sometimes is used in gas mixtures of fluorine-based plasma etchant for the processing of silicon dioxide film. [SEMI C3.4-88] Also see dry plasma etch.
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