on a semiconductor wafer, a portion of the periphery of a circular wafer that has been removed to a chord. [SEMI M1-94 and ASTM F1241] Also see primary orientation flat and secondary flat.
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on a semiconductor wafer, a portion of the periphery of a circular wafer that has been removed to a chord. [SEMI M1-94 and ASTM F1241] Also see primary orientation flat and secondary flat.