Definition of etch

a category of lithographic processes that remove material from selected areas of a die. Examples are nitride etch and oxide etch . [SEMATECH] 2 : in the manufacture of silicon wafers, a solution, a mixture of solutions, or a mixture of gases that attacks the surfaces of a film or substrate, removing material either selectively or nonselectively. [SEMI M1-94 and ASTM F1241] Also see anisotropic etch, preferential etch, dry plasma etch, reactive ion etch, and wet chemical etch.


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