1 : of a single-crystal silicon specimen, a defect of the crystal lattice in the form of irreversible deformation that results from mechanical surface treatments such as sawing, lapping, grinding, sandblasting, and shot peening at room temperature without subsequent heat treatments. [ASTM F1241]2 : any yield or reliability detractors other than those related to design, process specification violations, or particles. [SEMATECH]
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