, where L is the amount of change, and shown as L= - L. is the length of material before heat treatment and L is after heat treatment. [Adapted from SEMI D9-94]
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in flat panel display substrates, the shrinkage of a substrate caused by the relaxation of thermal stress and the structure change that occur when the substrate is heat treated along a specific thermal profile. Usually thermal is described with L/, where L is the amount of change, and shown as L= - L. is the length of material before heat treatment and L is after heat treatment. [Adapted from SEMI D9-94]
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, where L is the amount of change, and shown as L= - L. is the length of material before heat treatment and L is after heat treatment. [Adapted from SEMI D9-94]
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