a corrosive, colorless liquid that has a sharp, pungent odor. It hydrolyzes rapidly to form hydrogen chloride. Silicon tetrachloride is used for epitaxial deposition of single-crystal silicon and for high-temperature chemical vapor deposition of silicon dioxide. It also is used in the plasma etching process. [SEMI C3.11-86] Also called tetrachlorosilane. Also see dry plasma etch .
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