a colorless gas that is flammable and pyrophoric (capable of igniting spontaneously upon contact with air) and has a repulsive odor. Silane is used as a silicon source for the epitaxial deposition of single-crystal and polycrystalline silicon, for the low-temperature chemical vapor deposition of silicon dioxide, and for the chemical vapor deposition of silicon nitride films. It also is used for growth of amorphous silicon films. [SEMI C3.10-86]
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