the time required to put the equipment in a safe condition when entering a nonscheduled state. It includes any procedures necessary to reach a safe condition. Shutdown is included only in nonscheduled time. [SEMI E10-92] Also see equipment states.
the time required to put the equipment in a safe condition when entering a nonscheduled state. It includes any procedures necessary to reach a safe condition. Shutdown is included only in nonscheduled time. [SEMI E10-92] Also see equipment states.