1 : of an
epitaxial wafer, the boundary between the
substrate of an
epitaxial layer as determined by a specific measurement
method such as infrared reflectance or spreading resistance profiling. DISCUSSION-If determined by the infrared reflectance method, the position of the
interface depends on the
optical properties of the
layer and the
substrate.
If determined by spreading resistance, the position of the
interface is determined as follows:
- For a boundary between two layers (or a layer and a substrate) of the same conductivity type, the interface is taken as the point at which the resistivity increases to twice the local minimum value it has in the region of lower resistivity.
- For a boundary between two layers (or a layer and substrate) of opposite conductivity type, the interface is taken as the point at which the local maximum of resistivity occurs.
[ASTM 1241] 2 : a shared boundary. Examples include a hardware
component that links two devices or a portion of storage or registers accessed by two or more computer programs. [SEMATECH] Also see
substrate and
epitaxial layer. 4 v : to interact or communicate with another
component or entity within a computer network. [SEMATECH]
Search the Dictionary
