1 : any single geometric form appearing in a
layout as
- a part of a master drawing or layout (image, drafting)
- projected on a screen or viewed, usually at some magnification or reduction (image, optical)
- etched in the silicon dioxide layer on an oxidized silicon wafer (image, oxide)
- in a photomask or in the emulsion of a photographic film or plate (image, photographic)
- an exposed and developed coating on a substrate (image, photoresist)
[ASTM F127-84 and SEMI P25-94] 2 : in scanning
tunneling microscopy, representation of
surface topography obtained using the signal from the
tip or
surface during rastering and under
tunneling conditions. [SEMATECH] 3 : in atomic
force microscopy, representation of
surface topography obtained by using the signal from the
cantilever or
surface during rastering in constant
force conditions. [SEMATECH]
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