Periodic Table
of a gas piping system, all piping and components upstream of the pressure regulator, and in which the contained gas is at the same pressure as the gas cylinder or source. The high-pressure side includes the inlet chamber of the pressure regulator, as well as the cylinder pressure gauge. The term "high pressure" in this instance does not imply a particular value of pressure. [SEMI Chemicals/Gases, Vol. 1, 1990 (no longer in print)]




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