1 : the chemicals and specialty gases used in processing wafers. [SEMATECH] 2 : a solid, liquid, or gas that has a degree-of-hazard rating in health, flammability, or reactivity of Class 3 or 4 as ranked by Uniform Fire Code (UFC) Standard No. 79-3 and that is used directly in research, laboratory, or production processes with nonhazardous end products. (1988 Uniform Fire Code, Section 51.102) [SEMI F13-92]
Search the Dictionary
