any interruption or variance from the specifications of equipment operation that requires the replacement of a component (other than specified consumables) because of degradation or failure. Also includes assists that interrupt operation and require more than six minutes. [SEMI E10-92]
Search the Dictionary
© chemicool.com
Tools |
Periodic Table |
Citing Chemicool |
About |
Privacy |
Contact |
Archive
1 |
Science network |
Forum |
