abbreviation for develop inspect. See linewidth, PR.
linewidth, PR: a measurement of the resist feature produced on a wafer during photo processing after the develop process. [SEMATECH] Also called develop/inspect (D/I) and pre-etch.
abbreviation for develop inspect. See linewidth, PR.
linewidth, PR: a measurement of the resist feature produced on a wafer during photo processing after the develop process. [SEMATECH] Also called develop/inspect (D/I) and pre-etch.