a highly toxic, flammable, and colorless gas with a disagreeable garlic-like odor. It is a hemolytic poison. Arsine is used in the semiconductor industry for n-type doping of epitaxial films, for diffusion processes, in ion implantation, for the production of gallium arsenide phosphide films, and as a source for arsenic silicate glass films. [SEMI C3.2-88]
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